NAIST PATENT SEARCH SYSTEM   
日本語
     
 
NAIST Application NoP06-10



TitleSPHERICAL ABERRATION CORRECTION MODERATING TYPE LENS, SPHERICAL ABERRATION CORRECTION LENS SYSTEM, ELECTRON SPECTROSCOPY DEVICE, AND OPTICAL ELECTRON MICROSCOPE
INVENTORMATSUDA, Hiroyuki; .DAIMON, Hiroshi; .
Pub.NoWO/2008/013232Pub Date31.01.2008
International Application NoPCT/JP2007/064679International Application Date 26.07.2007

abstractProvided is a spherical aberration correction moderating type lens corrects the spherical aberration, which occurs in an electron or ion beam (as will be called the beam) emitted at a constant divergence angle from a predetermined object plane position. The lens has a rotor plane centered on an optical axis, and is equipped with at least two electrodes, to which an arbitrary voltage is to be applied from an external power source. At least one of the electrodes is a mesh (M) having such a concave shape with respect to an object plane (P0) as is shaped into a mesh (M) made of a rotor plane centered on the optical axis. The individual electrodes are caused, by the voltages applied thereto, to moderate the beam and to generate a moderating type convergent electric field for correcting the spherical aberration to occur in that beam. As a result, the spherical aberration correction moderating type lens converges such a beam on an image plane as is emitted from a specimen and as has a high energy and a large divergence angle.
National PhaseEP 17.02.2009 2007791379 (Published: 13.05.2009) / JP 23.01.2009 2008526810